About Us

The Micro Electro Mechanical Systems (MEMS) Laboratory at ITIMS is organized within Internaltional Training Institute for Materials Science in the Hanoi University of Science and Technology.
Our research interests lie in all aspects of micro / nano sciences and technologies, including micro structures and systems, micro sensors and actuators, micro mirrors, MEMS materials, integration and packaging technologies, and other relevant fields. In particular, we are interested in using the piezoelectric materials (thin films and bulk ceramics) such as PZT or BNKT to develop the novel devices for fundamental scientific research and applications in microfluidics, mass-biosensors, and energy harvesting.
Specifically, the MEMSlab is currently working on creating inertial sensors which are piezoresistive/capacitive accelerometers, comb structure tuning fork gyroscopes. Along with research the ITIMS MEMSLab aids in teaching studens and master students about MEMS technology, semiconductors materials in the Hanoi University of Science and Technology.
Contact Information
Assoc. Prof. Dr. Vu Ngoc Hung
E-mail: hungvungoc@itims.edu.vn
International Training Institute for Materials Sciences (ITIMS),
Hanoi University of Science and Technology (HUST),
No.1 Dai Co Viet Street, Hai Ba Trung District, Hanoi, Vietnam
Tel: 84-43-8680787; Fax: 84-43-8692963


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