- Three Stack Oxidation System
- DI Water System
- Double Side Align System PEM-800
- Ellipsometer
- Evaporation System
- DRIE Etching System
- Microscope
- SOG Spinner
- Sputtering System
- Oxygen Plasma System
- Spinner Unit
- Ultrasonic Bath
- TF2000E
- The 1100°C Mini-Mite Tube Furnace
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