• 2014
  1. Minh Duc Nguyen*, Evert Houwman, Matthijn Dekkers, Hung Ngoc Vu and Guus Rijnders, A Fast Room-Temperature Poling Process of Piezoelectric Pb(Zr0.45Ti0.55)O3 Thin Films, Science of Advanced Materials 6 (2014) 243-251 (ISSN: 1947-2935; ***ISI impact: 3.308***) DOI:
  2. Minh D. Nguyen*, Thong Q. Trinh, Matthijn Dekkers, Evert P. Houwman, Hung N. Vu and Guus Rijnders, Effect of dopants on ferroelectric and piezoelectric properties of lead zirconate titanate thin films on Si substrates, Ceramics International 40 (2014) 1013-1018 (ISSN: 0272-8842; ***ISI impact: 1.789***) DOI:                                       
  3. Thong Quang Trinh, Long Quang Nguyen, Dzung Viet Dao, Hoang Manh Chu* and Hung Ngoc Vu*, Design and Analysis of a Lateral Axis Tuning Fork Gyroscope with Guided-Mechanical Coupling, Microsystem Technologies 20 (2014) 281-289 (ISSN: 0946-7076; ***ISI impact: 0.827*** ) DOI:
  4. C.T.Q. Nguyen, M.D. Nguyen*, M. Dekkers, E. Houwman, H.N. Vu, G. Rijnders, “Process dependence of the piezoelectric response of membrane actuators based on Pb(Zr0.45Ti0.55)O3 thin films”, Thin Solid Films 556 (2014) 509-514.
    (IF2012:1.88; DOI:
  5.  Hoang Manh Chu*, Hung Vu Ngoc, Kazuhiro Hane, “Vacuum package using anodic bonding assisted by the reflow of low-melting temperature metal”, Int. J. Precision Engineering and Manufacturing. 15 (2014) 686-701.
    (IF0212:1.58;  DOI:
  6. Ngo Duc Quan, Vu Ngoc Hung, Nguyen Van Quyet, Hoang Vu Chung, and Dang Duc Dung*, “Band gap modification and ferroelectric properties of Bi0.5(Na,K)0.5TiO3-based by Li substitution”, AIP Advances, 4 (2014) 017122.
    (IF2012:1.34;  DOI:
  7. Vu Thu Hien, Nguyen Duc Minh and Vu Ngoc Hung, “Synthesis and characterizations of sol-gel-derived LaNiO3 thin-film electrodes on Si substrates”, International Journal of Nanotechnology (2014).
    (***IF2012:1.08; DOI: )
  8. B. Kaleli, M.D. Nguyen, J. Schmitz, R.A.M. Wolters, R.J.E. Hueting, “Analysis of thin-film PZT/LNO stacks on an encapsulated TiN electrode”,  Microelectronic Engineering, 119 (2014) 16-19.
    (***IF2012: 1.28***; DOI:
  9. B. Kaleli, R.J.E. Hueting, M.D. Nguyen and R.A.M. Wolters, “Integration of a piezoelectric layer on Si FinFETs for tunable strained device applications”, IEEE Transaction Electron Devices, 61 (2014) 1929-1935.
    (***IF2012: 2.06***; DOI:
  10. Hammad Nazeer, Minh D. Nguyen, Ozlem Sardan-Sukas, Guus Rijnders, Leon Abelmann, Miko C. Elwenspoek, “Compositional dependence of the Young’s modulus and piezoelectric coef´Čücient of (110) oriented pulsed laser deposited PZT thin films”, Journal of Microelectromechanical Systems, (2014) In press.
    (***IF2012: 2.12***; DOI:

  • 2013
  1.  Minh D. Nguyen*, Chi T. Q. Nguyen, Thong Q. Trinh, Tai Nguyen, Thao N. Pham, Guus Rijnders and Hung N. Vu*, Enhancement of ferroelectric and piezoelectric properties in PZT thin films with heterolayered structure, Materials Chemistry and Physics 138 (2013) 862-869 (***ISI impact: 2.234***). Download
  2. Hoang Manh Chu*, Hung Ngoc Vu, Kazuhiro Hane, Electric feed-through for vacuum package using double-side anodic bonding of silicon-on-insulator wafer, Journal of Electrostatics 71 (2013) 130–133 (***ISI impact: 1.080***). Download
  3. Vu Anh Minh, Le Anh Tuan, Tran Quang Huy, Vu Ngoc Hung, Nguyen Van Quy*, Enhanced NH3 gas sensing properties of a QCM sensor by increasing the length of vertically orientated ZnO nanorods, Applied Surface Science 265 (2013) 458-464 (***ISI impact: 2.103***). Download
  4. H. Yagubizade, M. Darvishi, Y. -Y. Chen, M. D. Nguyen, J. M. Dekkers, R. J. Wiegerink, M. C. Elwenspoek and N. R. Tas, Pulsed-laser deposited Pb(Zr0.52,Ti0.48)O3-on-silicon resonators with high-stopband rejection using feed-through cancellation, Applied Physics Letters 102 (2013) 063509(1-4) (***ISI impact: 3.840***). Download
  5. M. Dekkers, H. Boschker, M. van Zalk, M. Nguyen, H. Nazeer, E. Houwman and G. Rijnders, The significance of the piezoelectric coefficient d31,eff determined from cantilever structures, Journal of Micromechanics and Microengineering 23 (2013) 025008(1-7) (***ISI impact: 2.105***). Download
  6. Minh D. Nguyen*, Matthijn Dekkers, Hung N. Vu, and Guus Rijnders, Film-thickness and composition dependence of epitaxial thin-film PZT-based mass-sensors, Sensors and Actuators A 199 (2013) 98-105 (ISSN: 0924-4247; ***IF2012: 1.841***).
  7. M D Nguyen*, H Nazeer, M Dekkers, D H A Blank and G Rjinders, Optimized electrode coverage of membrane actuators based on epitaxial PZT thin films, Smart Materials and Structure 22 (2013) 085013 (ISSN: 0964-1726; ***IF2012: 2.024***).
  8. Evert P. Houwman*, Minh D. Nguyen*, Matthijn Dekkers and Guus Rjinders, Intrinsic stability of ferroelectric and piezoelectric properties of epitaxial PbZr0,45Ti0,55O3 thin films on silicon in relation to grain tilt, Science and Technology of Advanced Materials 14 (2013) 045006 (ISSN: 1468-6996; ***IF2012: 3.752***)
  • 2012
  • 2011
  1. Minh D. Nguyen, Matthijn Dekkers, Evert P. Houwman, Ruud Steenwelle, Xin Wan, Andreas Roelofs, Thorsten Schmitz-Kempen and Guus Rijnders, Misfit strain dependence of ferroelectric and piezoelectric properties of clamped (001) epitaxial Pb(Zr0.52,Ti0.48)O3 thin films, Applied Physics Letters 99 (2011) 252904(1-4) (***ISI impact: 3.840***). Download
  2. Nguyen Van Quy, Vu Anh Minh, Nguyen Van Luan, Vu Ngoc Hung*, and Nguyen Van Hieu*, Gas sensing properties at room temperature of a quartz crystal microbalance coated with ZnO nanorods, Sensors and Actuators B 153 (2011) 188-193 (***ISI impact: 3.898***). Download
  3. Minh D Nguyen*, Hung N Vu, Dave H A Blank and Guus Rijnders, Epitaxial Pb(Zr,Ti)O3 thin films for a MEMS application, Advances in Natural Sciences: Nanoscience and Nanotechnology 2 (2011) 015005 (1-5). Download
  4. Nguyen Thanh Huy and Vu Ngoc Hung, Influence of adhesion layers on the surface morphology of platinum-based electrodes for Pb(Zr,Ti)O3 thin films, Surface Review and Letters 18 (2011) 47-51 (***ISI impact: 0.493***). Download
  • 2010
  1. Phuc Hong Pham, Lam Bao Dang, Hung Ngoc Vu, Micro robot system with moving micro-car driven by electrostatic comb-drive actuators, Microsystems Technology 16 (2010) 505-510 (***ISI impact: 0.931***). Download
  • 2009
  1. Vu Ngoc Hung*, Le Van Minh, Bui Thi Huyen, and Nguyen Duc Minh, Improvement of electrical property for Pb(Zr0.53Ti0.47)O3 ferroelectric thin film deposited by sol-gel method on SRO electrode, Journal of Physics: Conference Series 187 (2009) 012063(1-6). Download
  2. Vu Ngoc Hung*, Nguyen Van Minh, Le Van Minh, Nguyen Huu Hung, Chu Manh Hoang, Dzung Viet Dao, Ranjith Amarasinghe, Bui Thanh Tung and Susumu Sugiyama, Design and Fabrication of a Miniaturized Three-Degree-of-Freedom Piezoresistive Acceleration Sensor Based on MEMS Technology Using Deep Reactive Ion Etching, Physics and Engineering of New Materials, Springer Proceedings in Physics 127 (2009) 377-383. Download


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